Brush scrubbing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 18, 2001
Issued Date -
N/A
app pub date -
Jan 12, 2001
filing date -
Mar 9, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A brush scrubbing apparatus is made up of a wafer holder which retains a wafer, a brush which removes a particle on the wafer, a driver which rotates at least one of the wafer holder and the wafer, an alignment mechanism which defines a relative position between the brush and the wafer holder, and controller which controls the alignment mechanism responding to a driving power supply voltage in the driver. The brush scrubbing apparatus can precisely get the reference position for deciding the pushing distance without using the eye measurement.
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