US Patent Application No: 2001/0001,983

LOCALIZED THERMO MANAGER FOR SEMICONDUCTOR DEVICES

Stats

May 31, 2001
Publication date
May 4, 1999
filing date
09/305,018
serial no
ABAN
status

Importance

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Abstract

A method and apparatus for measuring and controlling the temperature of a semiconductor device is described. The temperature of a semiconductor device is controlled by measuring the temperature at the semiconductor device and adjusting the temperature by supplying a coolant to the semiconductor device over a coolant line. The amount of coolant which flows to the semiconductor device is controlled by a solenoid switch connected to a valve in the coolant line. A system for measuring and controlling the temperatures of multiple semiconductor devices is also described.

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First Claim

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Related Publications

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Patent Owner(s)

Patent Owner	Address	Total Patents
LUCENT TECHNOLOGIES INC.	MURRAY HILL, NJ	9561
DARIUS C. GAMBINO	MURRAY HILL, NJ	0

International Classification(s)

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kim, Chang H	Cheongju, KR	55	121

Patent Citation Ranking

Forward Cites

Patent Info	(Count)	# Cites	Year
MITAC TECHNOLOGY CORP. (1)
6,971,441 Device and method for removing heat from object by spraying cooling agent		3	2003

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Nov 30, 2012

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00