LOCALIZED THERMO MANAGER FOR SEMICONDUCTOR DEVICES
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United States of America Patent
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N/A
Issued Date -
May 31, 2001
app pub date -
May 4, 1999
filing date -
May 4, 1999
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method and apparatus for measuring and controlling the temperature of a semiconductor device is described. The temperature of a semiconductor device is controlled by measuring the temperature at the semiconductor device and adjusting the temperature by supplying a coolant to the semiconductor device over a coolant line. The amount of coolant which flows to the semiconductor device is controlled by a solenoid switch connected to a valve in the coolant line. A system for measuring and controlling the temperatures of multiple semiconductor devices is also described.
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