Method of producing a pressure sensor component

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United States of America Patent

SERIAL NO

09761235

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to a method of producing a pressure sensor component with a chip carrier which has a substantially planar chip carrier surface and a semiconductor chip with an integrated pressure sensor on the chip carrier surface. The method comprises the steps of mounting and contacting a semiconductor chip with a pressure sensor on a substantially planar chip carrier surface of a chip carrier; placing a chimney-shaped connection piece onto the semiconductor chip to project upward from a pressure-detecting surface of the pressure sensor and to expose the pressure-detecting surface to a pressure to be measured, and pressure-tightly enclosing at least the pressure-detecting surface of the pressure sensor with an end of the connection piece bearing on the semiconductor chip; and encapsulating the pressure sensor component with a component encapsulation of an electrically insulating material, the component encapsulation enclosing one of the semiconductor chip and the chip carrier and enclosing a portion of the connection piece.

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Patent Owner(s)

Patent OwnerAddress
SIEMENS AKTIENGESELLSCHAFTWITTELSBACHERPLATZ 2 D-80333 MUENCHEN GERMANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bootz, Eric Kelheim, DE 3 31
Janczek, Thies Flintbek, DE 10 96
Neu, Achim Regensburg, DE 9 96
Stadler, Bernd Donaustauf, DE 23 313
Winterer, Jurgen Nurnberg, DE 9 81

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