Sample inspection system
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United States of America Patent
Stats
-
Oct 28, 2003
Grant Date -
May 31, 2001
app pub date -
Dec 21, 2000
filing date -
Sep 19, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.
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Cited Art Landscape
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