Substrate transport apparatus and transport teaching system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Aug 20, 2002
Grant Date -
May 31, 2001
app pub date -
Nov 29, 2000
filing date -
Nov 29, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
To provide a substrate transport device and a transport teaching system which can automatically perform a teaching processing in order to reduce the burden of an operator and to eliminate a positional shift accurately and efficiently in a short time. Optical connectors 251, 252, 253 and 254 of a jig 200 and optical connectors 256, 257, 258 and 259 fixedly provided on a substrate transport device are opposed to each other and optical axes are coincident with each other. A lens having a high condensation ratio is provided in each optical connector. A light signal is output from optical sensor heads 231 and 241 through an optical fiber F2, each optical connector and an optical fiber F1, and a light signal input to optical sensor heads 232 and 242 is guided into the substrate transport device. Then, an arm 31b is automatically moved in a three-axis direction. Thus, an edge position of a detected portion 122 is detected to acquire positional information so that teaching information is obtained.
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