Over-coating composition for photoresist, and processes for forming photoresist patterns using the same

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United States of America Patent

PATENT NO 6764806
APP PUB NO 20010003030A1
SERIAL NO

09728535

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Abstract

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The present invention provides an over-coating composition comprising a basic compound for coating a photoresist composition to provide a vertical photoresist pattern.

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Patent Owner(s)

  • HYUNDAI ELECTRONICS INDUSTRIES CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baik, Ki Ho Kyoungki-do, KR 87 2587
Jung, Jae Chang Kyoungki-do, KR 173 4633
Kim, Jin Soo Taejeon-shi, KR 174 1620
Koh, Cha Won Seoul, KR 27 101
Kong, Keun Kyu Kyoungki-do, KR 34 842

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