FLUID CONTROL APPARATUS
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United States of America Patent
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N/A
Issued Date -
Jun 14, 2001
app pub date -
Feb 13, 1998
filing date -
Feb 14, 1997
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves. The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
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