US Patent Application No: 2001/0003,381

Number of patents in Portfolio can not be more than 2000

METHOD TO LOCATE PARTICLES OF A PREDETERMINED SPECIES WITHIN A SOLID AND RESULTING STRUCTURES

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Abstract

The present invention relates to a method to locate particles of a predetermined species within a solid, more specifically to form an oxy-nitride dielectric for VLSI applications. A layer (18) of a substance (YZ) is formed upon a solid (10) and a chemical reaction is performed between the substance (YZ) and a gas (X), thereby releasing particles (Z) of a predetermined species which incorporate into the solid (10). This method is used, for example, to form an oxy-nitride dielectric by incorporating nitrogen within a silicon oxide layer (28').

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MOTOROLA, INC.SCHAUMBURG, IL7099

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adetutu, Olubunmi Olufemi Austin, TX 2 15
NGUYEN, BICH YEN AUSTIN, TX 1 2
Orlowski, Marius Austin, TX 28 203
TOBIN, PHILIP AUSTIN, TX 5 4
TSENG, HSING HUANG AUSTIN, TX 1 2

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
FREESCALE SEMICONDUCTOR, INC. (1)
7,927,956 Method for making a semiconductor structure using silicon germanium 0 2006
 
PROMOS TECHNOLOGIES INC. (1)
7,387,972 Reducing nitrogen concentration with in-situ steam generation 0 2006