US Patent Application No: 2001/0003,487
Number of patents in Portfolio can not be more than 2000
VISIBLE SPECTRUM MODULATOR ARRAYS
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Jun 14, 2001
Publication date -
Aug 20, 1999
filing date -
09/378,143
serial no -
ABAN
status
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Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.
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First Claim
Related Publications
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
| Patent Owner | Address | Total Patents |
|---|---|---|
| QUALCOMM MEMS TECHNOLOGIES, INC. | SAN DIEGO, CA | 589 |
| IRIDIGM DISPLAY CORPORATION | SAN FRANCISCO, CA | 1 |
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Miles, Mark W | San Francisco, CA | 191 | 10142 |
Patent Citation Ranking
Forward Cites
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 7,123,216 Photonic MEMS and structures | 482 | 1999 | |
| 7,138,984 Directly laminated touch sensitive screen | 89 | 2001 | |
| 6,680,792 Interferometric modulation of radiation | 457 | 2001 | |
| 7,042,643 Interferometric modulation of radiation | 155 | 2002 | |
| 7,110,158 Photonic MEMS and structures | 158 | 2002 | |
| 7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer | 20 | 2002 | |
| 7,297,471 Method for manufacturing an array of interferometric modulators | 17 | 2003 | |
| 7,221,495 Thin film precursor stack for MEMS manufacturing | 93 | 2003 | |
| 7,460,291 Separable modulator | 42 | 2003 | |
| 7,012,726 MEMS devices with unreleased thin film components | 65 | 2003 | |
| 7,198,973 Method for fabricating an interference display unit | 89 | 2003 | |
| 7,161,728 Area array modulation and lead reduction in interferometric modulators | 128 | 2003 | |
| 7,692,844 Interferometric modulation of radiation | 10 | 2004 | |
| 7,532,194 Driver voltage adjuster | 3 | 2004 | |
| 7,119,945 Altering temporal response of microelectromechanical elements | 120 | 2004 | |
| 7,706,050 Integrated modulator illumination | 27 | 2004 | |
| 7,193,768 Interference display cell | 22 | 2004 | |
| 7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof | 25 | 2004 | |
| 7,476,327 Method of manufacture for microelectromechanical devices | 29 | 2004 | |
| 7,060,895 Modifying the electro-mechanical behavior of devices | 38 | 2004 | |
| 7,280,265 Interferometric modulation of radiation | 40 | 2004 | |
| 7,164,520 Packaging for an interferometric modulator | 30 | 2004 | |
| 7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device | 45 | 2004 | |
| 7,893,919 Display region architectures | 2 | 2005 | |
| 7,813,026 System and method of reducing color shift in a display | 10 | 2005 | |
| 7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator | 10 | 2005 | |
| 7,424,198 Method and device for packaging a substrate | 2 | 2005 | |
| 7,710,632 Display device having an array of spatial light modulators with integrated color filters | 22 | 2005 | |
| 7,626,751 Display device having an array of spatial light modulators with integrated color filters | 0 | 2005 | |
| 7,142,346 System and method for addressing a MEMS display | 26 | 2005 | |
| 7,515,147 Staggered column drive circuit systems and methods | 9 | 2005 | |
| 7,379,227 Method and device for modulating light | 10 | 2005 | |
| 7,355,780 System and method of illuminating interferometric modulators using backlighting | 35 | 2005 | |
| 7,289,259 Conductive bus structure for interferometric modulator array | 55 | 2005 | |
| 7,460,246 Method and system for sensing light using interferometric elements | 8 | 2005 | |
| 7,560,299 Systems and methods of actuating MEMS display elements | 7 | 2005 | |
| 7,012,732 Method and device for modulating light with a time-varying signal | 53 | 2005 | |
| 7,359,066 Electro-optical measurement of hysteresis in interferometric modulators | 6 | 2005 | |
| 7,701,631 Device having patterned spacers for backplates and method of making the same | 2 | 2005 | |
| 7,259,449 Method and system for sealing a substrate | 12 | 2005 | |
| 7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 3 | 2005 | |
| 7,668,415 Method and device for providing electronic circuitry on a backplate | 5 | 2005 | |
| 7,429,334 Methods of fabricating interferometric modulators by selectively removing a material | 12 | 2005 | |
| 7,420,728 Methods of fabricating interferometric modulators by selectively removing a material | 15 | 2005 | |
| 7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate | 7 | 2005 | |
| 7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion | 7 | 2005 | |
| 7,299,681 Method and system for detecting leak in electronic devices | 1 | 2005 | |
| 7,920,135 Method and system for driving a bi-stable display | 2 | 2005 | |
| 7,679,627 Controller and driver features for bi-stable display | 1 | 2005 | |
| 7,586,484 Controller and driver features for bi-stable display | 12 | 2005 | |
| 7,535,466 System with server based control of client device display features | 5 | 2005 | |
| 7,532,195 Method and system for reducing power consumption in a display | 2 | 2005 | |
| 7,302,157 System and method for multi-level brightness in interferometric modulation | 37 | 2005 | |
| 7,289,256 Electrical characterization of interferometric modulators | 10 | 2005 | |
| 7,602,375 Method and system for writing data to MEMS display elements | 0 | 2005 | |
| 7,916,103 System and method for display device with end-of-life phenomena | 1 | 2005 | |
| 7,321,456 Method and device for corner interferometric modulation | 32 | 2005 | |
| 7,626,581 Device and method for display memory using manipulation of mechanical response | 1 | 2005 | |
| 7,372,613 Method and device for multistate interferometric light modulation | 63 | 2005 | |
| 7,889,163 Drive method for MEMS devices | 6 | 2005 | |
| 7,692,839 System and method of providing MEMS device with anti-stiction coating | 1 | 2005 | |
| 7,420,725 Device having a conductive light absorbing mask and method for fabricating same | 29 | 2005 | |
| 7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge | 3 | 2005 | |
| 7,843,410 Method and device for electrically programmable display | 4 | 2005 | |
| 7,719,500 Reflective display pixels arranged in non-rectangular arrays | 26 | 2005 | |
| 7,547,565 Method of manufacturing optical interference color display | 12 | 2005 | |
| 7,527,995 Method of making prestructure for MEMS systems | 20 | 2005 | |
| 7,808,703 System and method for implementation of interferometric modulator displays | 2 | 2005 | |
| 7,349,136 Method and device for a display having transparent components integrated therein | 7 | 2005 | |
| RE42119 Microelectrochemical systems device and method for fabricating same | 4 | 2005 | |
| 8,008,736 Analog interferometric modulator device | 0 | 2005 | |
| 7,710,629 System and method for display device with reinforcing substance | 3 | 2005 | |
| 8,124,434 Method and system for packaging a display | 0 | 2005 | |
| 7,554,714 Device and method for manipulation of thermal response in a modulator | 18 | 2005 | |
| 7,471,444 Interferometric modulation of radiation | 12 | 2005 | |
| 7,388,706 Photonic MEMS and structures | 10 | 2005 | |
| 7,345,805 Interferometric modulator array with integrated MEMS electrical switches | 6 | 2005 | |
| 7,196,837 Area array modulation and lead reduction in interferometric modulators | 18 | 2005 | |
| 7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 53 | 2005 | |
| 7,553,684 Method of fabricating interferometric devices using lift-off processing techniques | 6 | 2005 | |
| 7,417,783 Mirror and mirror layer for optical modulator and method | 7 | 2005 | |
| 7,373,026 MEMS device fabricated on a pre-patterned substrate | 12 | 2005 | |
| 7,343,080 System and method of testing humidity in a sealed MEMS device | 8 | 2005 | |
| RE40436 Hermetic seal and method to create the same | 7 | 2005 | |
| 7,304,784 Reflective display device having viewable display on both sides | 33 | 2005 | |
| 7,161,730 System and method for providing thermal compensation for an interferometric modulator display | 78 | 2005 | |
| 7,567,373 System and method for micro-electromechanical operation of an interferometric modulator | 19 | 2005 | |
| 7,936,497 MEMS device having deformable membrane characterized by mechanical persistence | 0 | 2005 | |
| 7,317,568 System and method of implementation of interferometric modulators for display mirrors | 1 | 2005 | |
| 7,310,179 Method and device for selective adjustment of hysteresis window | 8 | 2005 | |
| 7,724,993 MEMS switches with deforming membranes | 0 | 2005 | |
| 7,492,502 Method of fabricating a free-standing microstructure | 11 | 2005 | |
| 7,417,735 Systems and methods for measuring color and contrast in specular reflective devices | 23 | 2005 | |
| 7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 14 | 2005 | |
| 7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator | 10 | 2005 | |
| 7,136,213 Interferometric modulators having charge persistence | 14 | 2005 | |
| 7,564,612 Photonic MEMS and structures | 53 | 2005 | |
| 7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator | 144 | 2005 | |
| 7,369,294 Ornamental display device | 38 | 2005 | |
| 7,684,104 MEMS using filler material and method | 7 | 2005 | |
| 7,653,371 Selectable capacitance circuit | 10 | 2005 | |
| 7,415,186 Methods for visually inspecting interferometric modulators for defects | 3 | 2005 | |
| 7,675,669 Method and system for driving interferometric modulators | 2 | 2005 | |
| 7,453,579 Measurement of the dynamic characteristics of interferometric modulators | 10 | 2005 | |
| 7,545,550 Systems and methods of actuating MEMS display elements | 1 | 2005 | |
| 8,310,441 Method and system for writing data to MEMS display elements | 0 | 2005 | |
| 7,446,927 MEMS switch with set and latch electrodes | 5 | 2005 | |
| 7,486,429 Method and device for multistate interferometric light modulation | 8 | 2005 | |
| 7,236,284 Photonic MEMS and structures | 82 | 2005 | |
| 7,630,114 Diffusion barrier layer for MEMS devices | 1 | 2005 | |
| 8,014,059 System and method for charge control in a MEMS device | 0 | 2005 | |
| 7,618,831 Method of monitoring the manufacture of interferometric modulators | 0 | 2005 | |
| 7,403,323 Process control monitors for interferometric modulators | 1 | 2005 | |
| 7,369,252 Process control monitors for interferometric modulators | 0 | 2005 | |
| 7,259,865 Process control monitors for interferometric modulators | 20 | 2005 | |
| 8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays | 0 | 2005 | |
| 7,795,061 Method of creating MEMS device cavities by a non-etching process | 1 | 2005 | |
| 7,355,779 Method and system for driving MEMS display elements | 1 | 2006 | |
| 7,916,980 Interconnect structure for MEMS device | 0 | 2006 | |
| 7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 4 | 2006 | |
| 8,194,056 Method and system for writing data to MEMS display elements | 0 | 2006 | |
| 7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof | 2 | 2006 | |
| 7,547,568 Electrical conditioning of MEMS device and insulating layer thereof | 6 | 2006 | |
| 7,550,810 MEMS device having a layer movable at asymmetric rates | 19 | 2006 | |
| 7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers | 40 | 2006 | |
| 7,483,197 Photonic MEMS and structures | 16 | 2006 | |
| 7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices | 11 | 2006 | |
| 7,532,377 Movable micro-electromechanical device | 28 | 2006 | |
| 7,643,203 Interferometric optical display system with broadband characteristics | 17 | 2006 | |
| 7,948,457 Systems and methods of actuating MEMS display elements | 0 | 2006 | |
| 7,903,047 Mode indicator for interferometric modulator displays | 2 | 2006 | |
| 7,711,239 Microelectromechanical device and method utilizing nanoparticles | 0 | 2006 | |
| 7,623,287 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,527,996 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,417,784 Microelectromechanical device and method utilizing a porous surface | 42 | 2006 | |
| 8,049,713 Power consumption optimized display update | 1 | 2006 | |
| 7,920,136 System and method of driving a MEMS display device | 0 | 2006 | |
| 7,706,044 Optical interference display cell and method of making the same | 8 | 2006 | |
| 7,880,954 Integrated modulator illumination | 14 | 2006 | |
| 7,369,292 Electrode and interconnect materials for MEMS devices | 13 | 2006 | |
| 7,349,139 System and method of illuminating interferometric modulators using backlighting | 15 | 2006 | |
| 8,174,469 Dynamic driver IC and display panel configuration | 0 | 2006 | |
| 7,161,094 Modifying the electro-mechanical behavior of devices | 17 | 2006 | |
| 7,372,619 Display device having a movable structure for modulating light and method thereof | 74 | 2006 | |
| 7,649,671 Analog interferometric modulator device with electrostatic actuation and release | 7 | 2006 | |
| 7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports | 3 | 2006 | |
| 7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts | 60 | 2006 | |
| 7,187,489 Photonic MEMS and structures | 74 | 2006 | |
| 7,636,151 System and method for providing residual stress test structures | 0 | 2006 | |
| 7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures | 4 | 2006 | |
| 7,835,061 Support structures for free-standing electromechanical devices | 4 | 2006 | |
| 7,385,744 Support structure for free-standing MEMS device and methods for forming the same | 42 | 2006 | |
| 7,527,998 Method of manufacturing MEMS devices providing air gap control | 10 | 2006 | |
| 7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs | 3 | 2006 | |
| 7,566,940 Electromechanical devices having overlying support structures | 7 | 2006 | |
| 7,534,640 Support structure for MEMS device and methods therefor | 13 | 2006 | |
| 7,830,586 Transparent thin films | 10 | 2006 | |
| 7,554,711 MEMS devices with stiction bumps | 30 | 2006 | |
| 7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices | 3 | 2006 | |
| 7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants | 24 | 2006 | |
| 7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge | 2 | 2006 | |
| 7,629,197 Spatial light modulator | 27 | 2006 | |
| 7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure | 4 | 2006 | |
| 7,388,697 System and method for addressing a MEMS display | 5 | 2006 | |
| 7,242,512 System and method for addressing a MEMS display | 6 | 2006 | |
| 7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 40 | 2006 | |
| 7,355,782 Systems and methods of controlling micro-electromechanical devices | 6 | 2006 | |
| 7,706,042 MEMS device and interconnects for same | 2 | 2006 | |
| 7,535,621 Aluminum fluoride films for microelectromechanical system applications | 23 | 2006 | |
| 7,884,989 White interferometric modulators and methods for forming the same | 2 | 2007 | |
| 7,872,792 Method and device for modulating light with multiple electrodes | 4 | 2007 | |
| 7,733,552 MEMS cavity-coating layers and methods | 3 | 2007 | |
| 7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops | 7 | 2007 | |
| 8,059,326 Display devices comprising of interferometric modulator and sensor | 1 | 2007 | |
| 7,738,156 Display devices comprising of interferometric modulator and sensor | 0 | 2007 | |
| 7,715,085 Electromechanical system having a dielectric movable membrane and a mirror | 4 | 2007 | |
| 7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror | 5 | 2007 | |
| 8,111,262 Interferometric modulator displays with reduced color sensitivity | 0 | 2007 | |
| 7,625,825 Method of patterning mechanical layer for MEMS structures | 0 | 2007 | |
| 7,643,199 High aperture-ratio top-reflective AM-iMod displays | 6 | 2007 | |
| 7,782,517 Infrared and dual mode displays | 4 | 2007 | |
| 7,569,488 Methods of making a MEMS device by monitoring a process parameter | 21 | 2007 | |
| 7,944,599 Electromechanical device with optical function separated from mechanical and electrical function | 1 | 2007 | |
| 7,630,121 Electromechanical device with optical function separated from mechanical and electrical function | 9 | 2007 | |
| 7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function | 14 | 2007 | |
| 8,068,268 MEMS devices having improved uniformity and methods for making them | 1 | 2007 | |
| 8,115,987 Modulating the intensity of light from an interferometric reflector | 0 | 2007 | |
| 7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device | 14 | 2007 | |
| 7,723,015 Method for manufacturing an array of interferometeric modulators | 10 | 2007 | |
| 7,852,545 Method and device for modulating light | 8 | 2007 | |
| 7,808,694 Method and device for modulating light | 8 | 2007 | |
| 8,072,402 Interferometric optical modulator with broadband reflection characteristics | 2 | 2007 | |
| 7,492,503 System and method for multi-level brightness in interferometric modulation | 19 | 2007 | |
| 7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same | 2 | 2007 | |
| 7,564,613 Microelectromechanical device and method utilizing a porous surface | 2 | 2007 | |
| 7,982,700 Conductive bus structure for interferometric modulator array | 0 | 2007 | |
| 7,542,198 Device having a conductive light absorbing mask and method for fabricating same | 19 | 2007 | |
| 7,999,993 Reflective display device having viewable display on both sides | 0 | 2007 | |
| 7,556,917 Method for manufacturing an array of interferometric modulators | 11 | 2007 | |
| 7,773,286 Periodic dimple array | 2 | 2007 | |
| 7,715,079 MEMS devices requiring no mechanical support | 3 | 2007 | |
| 7,561,321 Process and structure for fabrication of MEMS device having isolated edge posts | 16 | 2007 | |
| 8,058,549 Photovoltaic devices with integrated color interferometric film stacks | 1 | 2007 | |
| 7,847,999 Interferometric modulator display devices | 1 | 2008 | |
| 7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device | 8 | 2008 | |
| 7,515,327 Method and device for corner interferometric modulation | 10 | 2008 | |
| 7,623,752 System and method of testing humidity in a sealed MEMS device | 4 | 2008 | |
| 7,570,865 System and method of testing humidity in a sealed MEMS device | 1 | 2008 | |
| 7,863,079 Methods of reducing CD loss in a microelectromechanical device | 0 | 2008 | |
| 7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 2 | 2008 | |
| 8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer | 1 | 2008 | |
| 8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer | 0 | 2008 | |
| 8,040,588 System and method of illuminating interferometric modulators using backlighting | 0 | 2008 | |
| 7,612,933 Microelectromechanical device with spacing layer | 16 | 2008 | |
| 7,898,723 Microelectromechanical systems display element with photovoltaic structure | 5 | 2008 | |
| 7,969,638 Device having thin black mask and method of fabricating the same | 0 | 2008 | |
| 7,839,557 Method and device for multistate interferometric light modulation | 5 | 2008 | |
| 8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 1 | 2008 | |
| 8,023,167 Backlight displays | 0 | 2008 | |
| 7,768,690 Backlight displays | 1 | 2008 | |
| 7,746,539 Method for packing a display device and the device obtained thereof | 1 | 2008 | |
| 8,226,836 Mirror and mirror layer for optical modulator and method | 0 | 2008 | |
| 7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices | 6 | 2008 | |
| 8,115,988 System and method for micro-electromechanical operation of an interferometric modulator | 0 | 2008 | |
| 8,054,527 Adjustably transmissive MEMS-based devices | 0 | 2008 | |
| 7,704,772 Method of manufacture for microelectromechanical devices | 11 | 2008 | |
| 7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control | 0 | 2008 | |
| 7,787,173 System and method for multi-level brightness in interferometric modulation | 6 | 2008 | |
| 7,808,695 Method and apparatus for low range bit depth enhancement for MEMS display architectures | 0 | 2008 | |
| 7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof | 11 | 2009 | |
| 7,944,604 Interferometric modulator in transmission mode | 1 | 2009 | |
| 8,270,056 Display device with openings between sub-pixels and method of making same | 0 | 2009 | |
| 7,864,403 Post-release adjustment of interferometric modulator reflectivity | 0 | 2009 | |
| 7,889,415 Device having a conductive light absorbing mask and method for fabricating same | 4 | 2009 | |
| 8,102,590 Method of manufacturing MEMS devices providing air gap control | 0 | 2009 | |
| 8,081,370 Support structures for electromechanical systems and methods of fabricating the same | 0 | 2009 | |
| 7,952,787 Method of manufacturing MEMS devices providing air gap control | 0 | 2009 | |
| 8,368,124 Electromechanical devices having etch barrier layers | 0 | 2009 | |
| 7,889,417 Electromechanical system having a dielectric movable membrane | 2 | 2009 | |
| 8,405,899 Photonic MEMS and structures | 0 | 2009 | |
| 8,358,266 Light turning device with prismatic light turning features | 0 | 2009 | |
| 8,270,062 Display device with at least one movable stop element | 0 | 2009 | |
| 8,068,269 Microelectromechanical device with spacing layer | 0 | 2009 | |
| 7,920,319 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2009 | |
| 7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator | 1 | 2009 | |
| 7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator | 0 | 2009 | |
| 8,098,416 Analog interferometric modulator device with electrostatic actuation and release | 0 | 2010 | |
| 7,835,093 Methods for forming layers within a MEMS device using liftoff processes | 4 | 2010 | |
| 8,218,229 Support structure for MEMS device and methods therefor | 0 | 2010 | |
| 8,149,497 Support structure for MEMS device and methods therefor | 1 | 2010 | |
| 7,852,544 Separable modulator | 31 | 2010 | |
| 7,952,789 MEMS devices with multi-component sacrificial layers | 4 | 2010 | |
| 8,284,475 Methods of fabricating MEMS with spacers between plates and devices formed by same | 0 | 2010 | |
| 8,298,847 MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same | 0 | 2010 | |
| 8,164,815 MEMS cavity-coating layers and methods | 0 | 2010 | |
| 8,394,656 Method of creating MEMS device cavities by a non-etching process | 0 | 2010 | |
| 8,278,726 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 0 | 2010 | |
| 7,898,725 Apparatuses with enhanced low range bit depth | 2 | 2010 | |
| 8,081,373 Devices and methods for enhancing color shift of interferometric modulators | 0 | 2010 | |
| 8,358,458 Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices | 0 | 2010 | |
| 8,213,075 Method and device for multistate interferometric light modulation | 0 | 2010 | |
| 8,035,883 Device having a conductive light absorbing mask and method for fabricating same | 0 | 2011 | |
| 8,098,417 Electromechanical system having a dielectric movable membrane | 0 | 2011 | |
| 8,368,997 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2011 | |
| 8,416,154 Apparatus and method for reducing perceived color shift | 0 | 2011 | |
| 8,289,613 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2011 | |
| 8,174,752 Interferometric modulator in transmission mode | 0 | 2011 | |
| 8,390,547 Conductive bus structure for interferometric modulator array | 0 | 2011 | |
| 8,243,360 Device having a conductive light absorbing mask and method for fabricating same | 0 | 2011 | |
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| 7,733,553 Light modulator with tunable optical state | 2 | 2005 | |
| 7,447,891 Light modulator with concentric control-electrode structure | 2 | 2005 | |
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| 7,256,922 Interferometric modulators with thin film transistors | 27 | 2004 | |
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| 7,172,915 Optical-interference type display panel and method for making the same | 69 | 2004 | |
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| 7,499,208 Current mode display driver circuit realization feature | 5 | 2005 | |
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| 6,450,683 Optical temperature measurement as an in situ monitor of etch rate | 2 | 2000 | |
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 14, 2012 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |