Radiation source for use in lithographic projection apparatus
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United States of America Patent
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Sep 17, 2002
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app pub date -
Dec 14, 2000
filing date -
Dec 17, 1999
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Abstract
A radiation source of a radiation system of a lithographic projection apparatus comprises electrodes for creating a discharge in a space between them such that the discharge collapses into a pinch volume. The collapsing discharge creates a highly ionized, high temperature plasma in the pinch volume. A working fluid is ejected from a jet nozzle into the pinching volume and is thereby raised to a high temperature state and emits extreme ultraviolet radiation.
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