Crash prevention in positioning apparatus for use in lithographic projection apparatus
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United States of America Patent
Stats
-
Dec 24, 2002
Grant Date -
Jun 21, 2001
app pub date -
Dec 19, 2000
filing date -
Dec 21, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In a multi-table lithographic apparatus in which substrate tables may be exchanged between a first working zone where substrates are loaded onto and removed from the table and a second working zones where wafers are exposed, collision prevention means are provided to prevent collisions between tables in the exchange process. The collision prevention means may be formed of a labyrinth or a revolving door. The exchange process may be controlled by shuttles, optionally including drive means, that are interlinked so that the tables can only be exchanged between zones together.
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