Micromachined device having electrically isolated components and a method for making the same
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United States of America Patent
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-
Apr 8, 2003
Grant Date -
Jul 5, 2001
app pub date -
Jan 19, 2001
filing date -
Jan 19, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
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