Method for probing an electrical device having a layer of oxide thereon

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United States of America Patent

PATENT NO 6708386
SERIAL NO

09814593

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bayne, Michael A Vancouver, WA 17 327
Gleason, Reed Portland, OR 17 342
Koxxy, Martin Hillsboro, OR 11 208
Lesher, Timothy Beaverton, OR 15 299
Smith, Kenneth Portland, OR 130 2081

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