Process for manufacturing a microsystem with a flexible membrane for a pressure sensor
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United States of America Patent
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Aug 20, 2002
Issued Date -
N/A
app pub date -
Mar 22, 2001
filing date -
Apr 17, 1997
priority date (Note) -
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Abstract
A process for manufacturing a microsystem for a pressure sensor includes the steps of deposit and forming a first conducting layer on a support. Deposit and forming a layer of sacrificial material covering the first conducting layer. Deposit and forming a second conducting layer on the layer of sacrificial material in the region located above the first conducting layer. Forming a first membrane layer covering and surrounding the layer of sacrificial material and the second conducting layer. Eliminating the layer of sacrificial material and forming the first membrane layer.
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