Method for producing a piezoelectric/electrostrictive actuator
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United States of America Patent
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Jul 22, 2003
Issued Date -
N/A
app pub date -
Feb 5, 2001
filing date -
Oct 14, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for forming a piezoelectric/electrostrictive actuator in which a piezoelectric/electrostrictive file is formed on a vibrating plate or lower electrode by applying a layer of a ceramic paste theron and baking the paste layer at a low temperature in a range below 300.degree. C. to form the film to its final thickness all in one step.
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