US Patent Application No: 2001/0013,313

Number of patents in Portfolio can not be more than 2000

Apparatus for fabricating semiconductor structures and method of forming the structures

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Abstract

An apparatus (100) and method (800) for forming high quality epitaxial layers of monocrystalline materials grown overlying monocrystalline substrates (310) such as large silicon wafers is provided. The apparatus (100) includes at least two deposition chambers (110) and (140) that are coupled together. The first chamber (110) is used to form an accommodating buffer layer (320) on the substrate (310) and the second (140) is used to form a layer of monocrystalline material (330) overlying the accommodating buffer layer (320).

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
FREESCALE SEMICONDUCTOR, INC.AUSTIN, TX7071

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Droopad, Ravindranath Chandler, AZ 80 1159
Ooms, William J Prescott, AZ 44 676
Ramdani, Jamal Chandler, AZ 95 1723
Yu, Zhiyi Gilbert, AZ 43 741

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
FREESCALE SEMICONDUCTOR, INC. (28)
6,501,973 Apparatus and method for measuring selected physical condition of an animate subject 21 2000
6,590,236 Semiconductor structure for use with high-frequency signals 6 2000
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6,493,497 Electro-optic structure and process for fabricating same 120 2000
6,638,838 Semiconductor structure including a partially annealed layer and method of forming the same 28 2000
6,501,121 Semiconductor structure 130 2000
6,673,646 Growth of compound semiconductor structures on patterned oxide films and process for fabricating same 28 2001
6,709,989 Method for fabricating a semiconductor structure including a metal oxide interface with silicon 79 2001
6,531,740 Integrated impedance matching and stability network 112 2001
6,646,293 Structure for fabricating high electron mobility transistors utilizing the formation of complaint substrates 34 2001
7,019,332 Fabrication of a wavelength locker within a semiconductor structure 3 2001
6,693,298 Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same 3 2001
6,855,992 Structure and method for fabricating configurable transistor devices utilizing the formation of a compliant substrate for materials used to form the same 5 2001
6,667,196 Method for real-time monitoring and controlling perovskite oxide film growth and semiconductor structure formed using the method 5 2001
6,589,856 Method and apparatus for controlling anti-phase domains in semiconductor structures and devices 6 2001
6,673,667 Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials 3 2001
6,693,033 Method of removing an amorphous oxide from a monocrystalline surface 0 2001
6,916,717 Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate 7 2002
7,045,815 Semiconductor structure exhibiting reduced leakage current and method of fabricating same 2 2002
7,169,619 Method for fabricating semiconductor structures on vicinal substrates using a low temperature, low pressure, alkaline earth metal-rich process 2 2002
6,885,065 Ferromagnetic semiconductor structure and method for forming the same 4 2002
7,020,374 Optical waveguide structure and method for fabricating the same 12 2003
6,965,128 Structure and method for fabricating semiconductor microresonator devices 10 2003
7,067,856 Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same 5 2004
7,005,717 Semiconductor device and method 7 2004
7,342,276 Method and apparatus utilizing monocrystalline insulator 3 2004
7,105,866 Heterojunction tunneling diodes and process for fabricating same 4 2004
7,211,852 Structure and method for fabricating GaN devices utilizing the formation of a compliant substrate 5 2005
 
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MOTOROLA MOBILITY LLC (3)
6,498,358 Structure and method for fabricating an electro-optic system having an electrochromic diffraction grating 155 2001
6,639,249 Structure and method for fabrication for a solid-state lighting device 13 2001
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REGENTS OF THE UNIVERSITY OF MINNESOTA (3)
7,446,335 Process and apparatus for forming nanoparticles using radiofrequency plasmas 7 2005
7,879,697 Growth of low dislocation density Group-III nitrides and related thin-film structures 0 2007
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CREE, INC. (2)
7,368,368 Multi-chamber MOCVD growth apparatus for high performance/high throughput 8 2004
RE43045 Multi-chamber MOCVD growth apparatus for high performance/high throughput 0 2010
 
SEIKO EPSON CORPORATION (2)
6,822,302 Substrate for electronic device, method for manufacturing substrate for electronic device, and electronic device 3 2002
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INTELLECTUAL VENTURES II LLC (1)
6,559,471 Quantum well infrared photodetector and method for fabricating same 8 2000
 
MOTOROLA SOLUTIONS, INC. (1)
6,992,321 Structure and method for fabricating semiconductor structures and devices utilizing piezoelectric materials 2 2001
 
SONY CORPORATION (1)
7,718,539 Method for photomask fabrication utilizing a carbon hard mask 0 2006
 
VEECO INSTRUMENTS INC. (1)
8,198,605 Apparatus and method for batch non-contact material characterization 1 2011
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (1)
8,441,653 Apparatus and method for batch non-contact material characterization 0 2012