Scanning system having a deflectable probe tip

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6530267
APP PUB NO 20010015097A1
SERIAL NO

09769255

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention is directed to a scanning system having one or several deflectable probe tips which are excited to oscillation at or near their resonant frequency. A saturation amplifier (16) is provided for detecting and measuring the phase shift between the excitation signal and the oscillation carried out by the probe tip. The saturation amplifier (16) generates a rectangular signal from the incoming sinusoidally-shaped signal (3e) while exactly maintaining the time-dependent position of the zero crossovers of the signal. The detection system, which is required for each probe tip, thereby acquires a very simple configuration of few commercially available components. Saturation amplified rectangular signals exclusively form the basis for the further evaluation. For this reason, a substantial independence of the signal intensity of the oscillation signal is ensured.

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Patent Owner(s)

  • CARL-ZEISS-STIFTUNG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Knupfer, Klaus Essingen, DE 10 328

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