Membraneless piezoelectric/electrostrictive microactuator and manufacturing method thereof
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United States of America Patent
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-
Jul 1, 2003
Grant Date -
Aug 23, 2001
app pub date -
Apr 30, 2001
filing date -
Jul 13, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention relates to a membraneless piezoelectric/electrostrictive microactuator comprising: a chamber; a chamber plate in which the chamber is formed; a lower electrode formed on the chamber plate and covering the chamber; a bonding layer formed between the chamber plate and the lower electrode and bonding the chamber plate and the lower electrode; a piezoelectric/electrostrictive film formed on the lower electrode and vibrating when electrified; and an upper electrode formed on the piezoelectric/electrostrictive film, and a manufacturing method thereof, which is membraneless so that structure is simple so that manufacturing method is simple and production cost is reduced to effect eventually the productivity improvement, so also which produces effect of reliability and yield ratio improvement as it is membraneless so that there occur no deformation, crack or void at the bonding part of vibration plate and piezoelectric/electrostrictive film.
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