Cooling device and cooling method
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United States of America Patent
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-
May 10, 2005
Grant Date -
Aug 30, 2001
app pub date -
Mar 8, 2001
filing date -
Jan 19, 1995
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cooling device for cooling an object to be processed to a target temperature comprises a plurality of contact members mounted on a placing table, for supporting the object such that the object opposes a top surface of the placing table with an interval, temperature sensors for outputting temperature information of the object supported by the contact members, a first cooling unit for cooling the placing table to a temperature lower than the target temperature to cool the object, a second cooling unit for heating the object cooled by the first cooling unit to a temperature almost equal to the target temperature, and a contrast circuit for performing a switching operation between cooling by the first cooling unit and heating by the second cooling unit on the basis of the temperature information from the temperature sensors.
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