Rotating probe microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Oct 29, 2002
Grant Date -
Aug 30, 2001
app pub date -
May 17, 2000
filing date -
May 24, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
In a probe microscope 120 for causing a sample 112 and a tip portion 118a of a probe 118 on the sample side to approach each other, detecting an interaction between the sample 112 and the sample-side probe tip portion 118a, and obtaining surface information of the sample 112 from the interaction, the probe 118 being a flexible needle-like probe; the probe microscope 120 comprises vibrating means 122 capable of rotating the probe 118 while flexing the sample-side tip portion 118a thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface 112 and the tip portion 118a, and detecting means 124 for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion 118a due to the interaction and obtaining, from the increase and decrease in the size of the circle, information about the distance between the sample 112 and the sample-side probe tip portion 118a.
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