High-temperature gas control valve
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United States of America Patent
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-
Jan 21, 2003
Grant Date -
Oct 11, 2001
app pub date -
Apr 5, 2001
filing date -
Apr 11, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A high-temperature gas control valve for controlling a flow of a high-temperature gas, includes a valve seat made of metal, a diaphragm made of metal, which is brought into contact with or separated from the valve seat by operation of an actuator, thereby opening and closing the valve. At least one of the diaphragm and the valve seat is coated with an amorphous-carbon film.
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