Chemical filter and manufacturing method thereof
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United States of America Patent
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N/A
Issued Date -
Oct 18, 2001
app pub date -
Jan 23, 2001
filing date -
Jan 31, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A chemical filter is provided with an adsorbent filter medium for removing gaseous impurities and agglutinating organic substances in the air. The adsorbent filter medium is of a corrugated honeycomb structure comprising fiber material and is a fiber base paper having an interfiber void ratio of 80 to 95% upon which a gas adsorbent or a gas reactant has been deposited. As a result, using fiber which contains substantially no boric oxide as the absorbent fiber medium enables contaminants generated from the chemical filter itself to be removed, and therefore improves the yield of semiconductors and precision electronic components manufactured. Moreover, the amount of active carbon deposited is markedly high, and thus, if impregnated with a reactant, the amount of reactant deposited is able to be increased, leading to superior removal performance with respect to gaseous contaminants as well as reduced pressure loss and longer life of the filter.
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