Balanced microdevice and rotary electrostatic microactuator use therewith
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 22, 2002
Grant Date -
Oct 18, 2001
app pub date -
Nov 29, 2000
filing date -
Nov 29, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.
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