A method of fabricating a bottom anti-reflectivity coating (BARC) layer. The method of the invention comprises performing a pre-bake process on a provided titanium nitride layer. Amine ions absorbed into the surface of the titanium nitride layer are thus removed by the high temperature of the pre-bake process. A BARC layer is formed on the titanium nitride layer. A bake step is performed to remove a solvent, which is used for coating the BARC layer. A photoresist layer is coated on the BARC layer. Then, a soft-bake step is performed to remove a solvent, which is used for coating the photoresist layer. A photomask with a pattern is provided over the photoresist layer. An exposure step is performed to transfer the pattern to the photoresist layer. A development step is performed to remove a part of the photoresist layer so that the pattern is shown within the photoresist layer. A hard-bake step is performed to minimize the solvent in the photoresist layer.
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