Biased rotatable combdrive sensor methods
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Nov 15, 2001
app pub date -
Mar 14, 2001
filing date -
Mar 24, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
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