Cassette carrier for wafer cleaning processes
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Nov 22, 2001
app pub date -
Jan 25, 2001
filing date -
May 18, 2000
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An improvement of a cassette carrier is provided to improve wafer cleaning processes. The carrier includes a support and two opposed suspensions positioned at both sides of the support and each provided with a fixing mechanism for suspending edges of cassettes. According to the present invention, the structure of the carrier for carrying the cassettes is simplified to reduce amount of chemicals adhered to and remained on the surface of the carrier during wafer cleaning, thereby shortening wafer cleaning time and enhancing wafer cleaning efficiency.
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