Spectral identification system

United States of America Patent

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N/A
Issued Date
Nov 22, 2001
app pub date
Apr 6, 2001
filing date
Apr 7, 2000

priority date (Note)
Abandoned

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Abstract

A method and apparatus for spectral identification of a material based on a spectral signature. The method is ideally suited for thin film substrate characterization, as found in semiconductor wafer and optical thin film processing.

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Patent Owner(s)

Patent Owner	Address
MKS INSTRUMENTS INC	2 TECH DRIVE SUITE 201 ANDOVER MA 01810

International Classification(s)

G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Barney, Bryan	Aptos, CA	1	5
Kamlet, Leonard	San Jose, CA	1	5
Spores, Alson	Antioch, CA	1	5

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Spectral identification system

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United States of America Patent

09827455

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09827455

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