Laser system and method for single press micromachining of multilayer workpieces
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United States of America Patent
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Jun 18, 2002
Issued Date -
N/A
app pub date -
Mar 30, 2001
filing date -
Mar 30, 2000
priority date (Note) -
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Abstract
A single pass actuator (70, 200), such as a deformable mirror (70), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output (66) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers (264) at higher fluences and underlying dielectric layers (266) at lower fluences to protect bottom metallic layers (268). The focus change is accomplished without requiring Z-axis movement of the laser positioning system (62). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.
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