CONTAINER AND LOADER FOR SUBSTRATE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Dec 6, 2001
app pub date -
Oct 19, 1999
filing date -
Dec 1, 1997
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A loader disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article to the high cleanliness room, which comprises: (a) a stage for mounting the container; (b) an opening portion through which the dust free article is transported between the inside of the container and the high cleanliness room; (c) a door for opening and closing the opening portion; (d) unifying means for unifying a cover of the container and the door when the container approaches the door; and (e) a driving means for transferring unified cover and door within the loader to simultaneously open and close the opening portion and the container.
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