Lens system, in particular projection lens system in semiconductor lithography
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 3, 2002
Grant Date -
Jan 3, 2002
app pub date -
Jun 5, 2001
filing date -
Jun 17, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
In the case of a lens system, in particular a projection lens system in semiconductor lithography, with a plurality of optical elements, such as lenses, which are mounted in mounts, the mounts being connected to one another, if appropriate by means of adjusting rings, at least one inner mount of an optical element which is intended for removal and/or later fitting is connected to an outer mount by means of a three-point mounting.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully