Accelerometer without proof mass
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United States of America Patent
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-
Dec 23, 2003
Issued Date -
N/A
app pub date -
May 4, 2001
filing date -
Jun 26, 1996
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An accelerometer has a substrate with a cavity therein, a heater extending over the cavity, and a pair of temperature sensitive elements each spaced apart from the heater a distance of 75-400 microns also extending over the cavity. On passing an electrical current through the heater a symmetrical temperature distribution is set up on both sides of the heater. On acceleration, this distribution moves and by measuring the temperature as sensed by the pair of temperature sensitive elements the acceleration that caused the shift can be calculated.
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