Apparatus and method for controlling boiling conditions of hot phosphoric acid solution with pressure adjustment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6758940
APP PUB NO 20020007803A1
SERIAL NO

09796166

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed is an apparatus and method for controlling boiling condition of hot H.sub.3 PO.sub.4 solution by adjusting the vapor extracting rate thereof, wherein an acid tank filled with hot H.sub.3 PO.sub.4 solution to a level surface is located in a treatment room and a temperature thermocouple is arranged above the level surface of the hot H.sub.3 PO.sub.4 solution to monitor the vapor temperature near the level surface of the H.sub.3 PO.sub.4 solution. The vapor temperature is used to adjust the extracting rate of the treatment room by control of a damper connected to an outlet of the treatment room. According to the present invention, the treatment apparatus and method can control the boiling condition of the hot H.sub.3 PO.sub.4 solution thereof by properly adjusting the extracting rate, and therefore avoid defects and loss of control in manufacturing processes.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
PROMOS TECHNOLOGIES INCA3 3F NO 1 LI HSIN 1ST RD HSINCHU SCIENCE PARK HSINCHU 30078

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiu, John Hsinchu, TW 18 429

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation