Barrier coating for vitreous materials
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United States of America Patent
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Jan 23, 2007
Issued Date -
N/A
app pub date -
Apr 6, 2001
filing date -
Apr 6, 2000
priority date (Note) -
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Abstract
A chemical vapor deposition apparatus comprises a reaction chamber and one or more vitreous components having an outer surface that is covered at least in part by a devitrification barrier layer. In some arrangements, the one or more vitrious components can include a thermocouple. In a preferred arrangement, the devitrification barrier coating is formed from silicon nitride, which can be deposited on the vitreous component using chemical vapor deposition (CVD).
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