Sensor fabricating method
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United States of America Patent
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May 5, 2009
Grant Date -
Feb 7, 2002
app pub date -
May 2, 2001
filing date -
May 2, 2000
priority date (Note) -
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Abstract
The present invention provides methods for fabricating a sensor on a substrate having a pair of electrodes. The methods are especially amenable to broad variations amongst individual sensor on a single substrate. The intra-sensor variation within the array can be achieved in various fashions. The method provide intra-sensor variation using quantitative and qualitative differences in each sensor.
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