Interferometric modulation of radiation
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United States of America Patent
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Mar 15, 2005
Issued Date -
N/A
app pub date -
Sep 28, 2001
filing date -
May 5, 1994
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In one embodiment the invention provides an interferometric modulator comprising a cavity defined by two walls held by a support. The support comprises two materials such that the electrical or mechanical properties of the mechanical support differ at different locations in a cross-section of the mechanical support.
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