Spectral ellipsometer having a refractive illuminating optical system
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United States of America Patent
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N/A
Issued Date -
Feb 28, 2002
app pub date -
Jun 29, 2001
filing date -
Jul 11, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention concerns a spectral ellipsometer having a refractive illuminating optical system (3) that is equipped with a small illuminating aperture and is designed for a wide wavelength region. By color correction of the illuminating optical system (3), a very small measurement spot (6) is generated on a specimen surface (4).
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