Monolithic three dimensional array of charge storage devices containing a planarized surface
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United States of America Patent
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Apr 19, 2005
Grant Date -
Mar 7, 2002
app pub date -
Aug 13, 2001
filing date -
Aug 14, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
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