MOSFET power device manufactured with reduced number of masks by fabrication simplified processes
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United States of America Patent
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Jun 11, 2002
Grant Date -
Mar 14, 2002
app pub date -
Oct 2, 1997
filing date -
Oct 2, 1997
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Abstract
This invention discloses a semiconductor substrate supports a semiconductor power device. The semiconductor substrate includes a plurality of polysilicon segments disposed over a gate oxide layer including two outermost segments and inner segments wherein each of the inner segments functioning as a gate and the two outermost segments functioning as a field pate and an equal potential ring separated by an oxide-plug gap having an aspect ratio greater or equal to 0.5. Each of the inner segments functioning as a gate having a side wall spacer surrounding edges of the inner segments, and the oxide plug gap being filled with an oxide plug for separating the field plate from the equal potential ring. A plurality of power transistor cells disposed in the substrate for each of the gates covered by an overlying insulation layer having a plurality of contact openings defined therein. A plurality of metal segments covering the overlying insulation layer and being in electric contact with the power transistor cells through the contact openings. A plurality of deep-and-narrow gaps between the metal segments wherein each gap having an aspect ratio equal or greater than 0.5. A passivation layer disposed in the deep-and-narrow gaps between the metal segments having a thickness substantially the same as the metal segments for blocking mobile ions from entering into the power transistor cells.
First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- ALPHA & OMEGA SEMICONDUCTOR, LTD.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Hshieh, Fwu-Iuan | Saratoga, CA | 163 | 5785 |
Tsui, Yan Man | Union City, CA | 31 | 916 |
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Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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