US Patent Application No: 2002/0031,417

Number of patents in Portfolio can not be more than 2000

Fluid control device

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Abstract

Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI121
FUJIKIN INCORPORATEDOSAKA, JP191
TOKYO ELECTRON LIMITEDTOKYO5116

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Kasugai, JP 8 67
Hoshi, George Tsukui-gun, JP 7 25
Kawano, Yuji Amagasaki, JP 43 395
Kobayashi, Hideo Saitama, JP 295 1576
Nagaya, Akinori Komaki-shi, JP 3 5
Okabe, Tsuneyuki Oshu, JP 42 59
Yamaji, Michio Osaka, JP 129 713
Yoshikawa, Kazuhiro Tokyo, JP 56 150

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