US Patent Application No: 2002/0031,417

Number of patents in Portfolio can not be more than 2000

Fluid control device

ALSO PUBLISHED AS: 8973615

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI119
FUJIKIN INCORPORATEDOSAKA, JP166
TOKYO ELECTRON LIMITEDTOKYO4843

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Kasugai, JP 9 88
Hoshi, George Tsukui-gun, JP 11 42
Kawano, Yuji Amagasaki, JP 58 449
Kobayashi, Hideo Saitama, JP 374 1930
Nagaya, Akinori Komaki-shi, JP 4 19
Okabe, Tsuneyuki Oshu, JP 54 127
Yamaji, Michio Osaka, JP 155 971
Yoshikawa, Kazuhiro Tokyo, JP 91 221

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Patent Info (Count) # Cites Year
 
FUJIKIN INCORPORATED (1)
* 2012/0192,964 FLUID CONTROL APPARATUS 0 2012
* Cited By Examiner