Fluid control device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO

8973615

APP PUB NO

20020031417A1

SERIAL NO

09893522

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, and coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI138
FUJIKIN INCORPORATEDOSAKA, JP204
TOKYO ELECTRON LIMITEDTOKYO5246

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Komaki, JP 7 129
Hoshi, George Tsukui-gun, JP 6 88
Kawano, Yuji Osaka, JP 46 534
Kobayashi, Hideo Komaki, JP 296 2334
Nagaya, Akinori Komaki, JP 2 58
Okabe, Tsuneyuki Tsukui-gun, JP 32 198
Yamaji, Michio Osaka, JP 132 1249
Yoshikawa, Kazuhiro Osaka, JP 78 366

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SWAGELOK COMPANY (1)
* 6502601 Modular surface mount manifold assemblies 20 2002
 
FUJIKIN INCORPORATED (1)
* 6273139 Fluid control apparatus 31 1998
 
SUH, DONG TACK (1)
* 6152175 Process gas supply unit 21 1998
 
FESTO KG (1)
5025834 Mounting plate storing conductor function 16 1989
 
KINETIES FLUID SYSTEMS, CORPORATION OF DELAWARE (1)
* 6283155 System of modular substrates for enabling the distribution of process fluids through removable components 37 1999
 
ICHOR SYSTEMS, INC. (2)
* 6076543 Gas handling device 16 1997
* 6394138 Manifold system of removable components for distribution of fluids 35 1999
 
CELERITY, INC. (1)
* 6231260 Mounting plane for integrated gas panel 8 1997
* Cited By Examiner

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