US Patent Application No: 2002/0031,417

Number of patents in Portfolio can not be more than 2000

Fluid control device

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI133
FUJIKIN INCORPORATEDOSAKA, JP200
TOKYO ELECTRON LIMITEDTOKYO5457

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Kasugai, JP 8 70
Hoshi, George Tsukui-gun, JP 10 26
Kawano, Yuji Amagasaki, JP 51 415
Kobayashi, Hideo Saitama, JP 355 1727
Nagaya, Akinori Komaki-shi, JP 3 5
Okabe, Tsuneyuki Oshu, JP 47 88
Yamaji, Michio Osaka, JP 145 805
Yoshikawa, Kazuhiro Tokyo, JP 71 170

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