US Patent Application No: 2002/0031,417

Number of patents in Portfolio can not be more than 2000

Fluid control device

ALSO PUBLISHED AS: 8973615

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI115
FUJIKIN INCORPORATEDOSAKA, JP165
TOKYO ELECTRON LIMITEDTOKYO4856

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Kasugai, JP 9 82
Hoshi, George Tsukui-gun, JP 11 36
Kawano, Yuji Amagasaki, JP 56 437
Kobayashi, Hideo Saitama, JP 371 1883
Nagaya, Akinori Komaki-shi, JP 4 13
Okabe, Tsuneyuki Oshu, JP 54 118
Yamaji, Michio Osaka, JP 153 929
Yoshikawa, Kazuhiro Tokyo, JP 86 206

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