US Patent Application No: 2002/0031,417

Number of patents in Portfolio can not be more than 2000

Fluid control device

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, end Coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CKD CORPORATIONKOMAKI-SHI131
FUJIKIN INCORPORATEDOSAKA, JP191
TOKYO ELECTRON LIMITEDTOKYO5081

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Komaki-shi, JP 7 117
Hoshi, George Tsukui-gun, JP 6 75
Kawano, Yuji Osaka-shi, JP 45 511
Kobayashi, Hideo Komaki-shi, JP 291 2214
Nagaya, Akinori Komaki-shi, JP 2 46
Okabe, Tsuneyuki Tsukui-gun, JP 32 175
Yamaji, Michio Osaka-shi, JP 129 1175
Yoshikawa, Kazuhiro Osaka-shi, JP 75 317

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SUH, DONG-TACK (A/K/A DONG T. SEO) (1)
* 6,152,175 Process gas supply unit 21 1998
 
FESTO KG (1)
* 5,025,834 Mounting plate storing conductor function 16 1989
 
ICHOR SYSTEMS, INC. (1)
* 6,076,543 Gas handling device 16 1997
 
CELERITY, INC. (1)
* 6,231,260 Mounting plane for integrated gas panel 7 1997
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
FUJIKIN INCORPORATED (2)
* 2014/0110,936 FIXING DEVICE FOR LOWER STAGE MEMBERS AND FLUID CONTROL DEVICE EQUIPPED WITH FIXING DEVICE 0 2011
* 2012/0192,964 FLUID CONTROL APPARATUS 0 2012
* Cited By Examiner