Potted transducer array with matching network in a multiple pass configuration
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United States of America Patent
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-
N/A
Issued Date -
Apr 4, 2002
app pub date -
Dec 6, 2001
filing date -
Jun 28, 1999
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The invention provides a pair of parallel megasonic transducers that generate parallel columns of megasonic waves across a cleaning container. Semiconductor wafers move back and forth transverse to the columns. The transducers have their back side potted with a silicone elastomer to prevent corrosion. In another embodiment megasonic waves from in-line transducers are dispersed with a cylindrical quartz rod. Water is enriched with ozone by pumping ozone under pressure through a filter into sealed housing of deionized water.
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