Apparatus for reducing vibration inputs to a device and/or for micropositioning
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United States of America Patent
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-
Jun 18, 2002
Grant Date -
Apr 25, 2002
app pub date -
Jan 10, 2000
filing date -
Sep 7, 1994
priority date (Note) -
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status (Latency Note)
Importance
Abstract
Apparatus for compensating for positioning, pointing and/or orientation errors caused by deflections of structural members and components of a high performance machine or device and/or for reducing vibration inputs to such machine or device and/or for micro-positioning such machine or device so as to improve the operational performance of such machine or device. The apparatus utilizes one or more active-type actuators, such as piezoelectric ceramic type actuators, which are arranged in a predetermined manner relative to the machine or device. A servo control device operating in accordance with a predetermined algorithm may be utilized for controlling the actuators or, alternatively, the apparatus may operate in an open loop manner.
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