Method for producing a micromechanical structure and a micromechanical structure
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United States of America Patent
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Aug 20, 2002
Grant Date -
May 9, 2002
app pub date -
Nov 5, 2001
filing date -
Nov 9, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.
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