Anchor for device package
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United States of America Patent
Stats
-
Jan 31, 2006
Grant Date -
May 30, 2002
app pub date -
Nov 13, 2001
filing date -
Nov 30, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.
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