Apparatus for providing ozonated process fluid and methods for using same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 6, 2002
app pub date -
Dec 1, 2000
filing date -
Dec 2, 1999
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention is directed to apparatus and methods for wet processing electronic components using ozonated process fluids. In the apparatus and methods of the present invention, the ozonated process fluid is provided by an apparatus having a vessel for containing a stock fluid; an ozone source connected to the vessel for supplying ozone to the vessel; a fluid source in fluid communication with the vessel for supplying a fluid to the vessel; and a back-pressure regulator connected with an exhaust for regulating pressure within the vessel.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully