Wafer transport system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 10, 2003
Grant Date -
Jun 6, 2002
app pub date -
Dec 4, 2000
filing date -
Dec 2, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer transport mechanism is disclosed capable of transferring workpiece cassettes between lot boxes and SMIF pods. The transport mechanism includes a frame having a first support platform on a first side of the frame for supporting a SMIF pod, and a second support platform on a second side of the frame for supporting a lot box. The frame further includes a carrier transfer mechanism which resides completely within the frame when in a home position. The transfer mechanism includes an arm and a gripper pivotally mounted to the arm. Once a SMIF pod and lot box are seated on their respective support platforms, the transfer mechanism transfers a cassette between the two containers.
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