Microelectromechanical system (MEMS) with improved beam suspension
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United States of America Patent
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-
Oct 12, 2004
Grant Date -
Jun 13, 2002
app pub date -
Oct 25, 2001
filing date -
Sep 21, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.
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