Apparatus and method for grasping and transporting wafers
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United States of America Patent
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Issued Date -
Jun 13, 2002
app pub date -
Dec 11, 2001
filing date -
Dec 11, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention concerns an apparatus for grasping and transporting wafers (1), having a two-armed grasping apparatus (7), pivotable about a central rotation point (13), at whose two free ends grasping/retaining elements (12) equipped with vacuum suction devices (11) are arranged. In order to make available an apparatus of the kind cited initially, as well as a transport arrangement equipped with such an apparatus, that make possible faster transport of the wafers (1) without long dead times and thus permit an increase in overall throughput, it is proposed according to the present invention that the two arms (10) of the grasping apparatus (7) be angled with respect to one another at an angle (.alpha.) 90.degree.<.alpha.<180.degree.. The invention furthermore concerns a complete transport arrangement equipped with such an apparatus, as well as a method for operating said transport arrangement.
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