US Patent Application No: 2002/0075,555
Number of patents in Portfolio can not be more than 2000
Interferometric modulation of radiation
Stats
-
Jun 20, 2002
Publication date -
Nov 21, 2001
filing date -
09/991,378
serial no -
ABAN
status
Importance
Loading Importance Indicators...
Overall
|
US Family Size
|
International Coverage
|
Abstract
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques . The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
Loading the Abstract Image...
First Claim
Related Publications
Loading Related Publications...
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
| Patent Owner | Address | Total Patents |
|---|---|---|
| QUALCOMM MEMS TECHNOLOGIES, INC. | SAN DIEGO, CA | 594 |
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Miles, Mark W | San Francisco, CA | 191 | 10168 |
Patent Citation Ranking
Forward Cites
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 7,123,216 Photonic MEMS and structures | 484 | 1999 | |
| 7,138,984 Directly laminated touch sensitive screen | 90 | 2001 | |
| 6,680,792 Interferometric modulation of radiation | 459 | 2001 | |
| 7,042,643 Interferometric modulation of radiation | 155 | 2002 | |
| 7,110,158 Photonic MEMS and structures | 158 | 2002 | |
| 7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer | 20 | 2002 | |
| 7,297,471 Method for manufacturing an array of interferometric modulators | 17 | 2003 | |
| 7,221,495 Thin film precursor stack for MEMS manufacturing | 93 | 2003 | |
| 7,460,291 Separable modulator | 42 | 2003 | |
| 7,012,726 MEMS devices with unreleased thin film components | 65 | 2003 | |
| 7,198,973 Method for fabricating an interference display unit | 89 | 2003 | |
| 7,161,728 Area array modulation and lead reduction in interferometric modulators | 130 | 2003 | |
| 7,692,844 Interferometric modulation of radiation | 10 | 2004 | |
| 7,532,194 Driver voltage adjuster | 3 | 2004 | |
| 7,119,945 Altering temporal response of microelectromechanical elements | 120 | 2004 | |
| 7,706,050 Integrated modulator illumination | 27 | 2004 | |
| 7,193,768 Interference display cell | 22 | 2004 | |
| 7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof | 25 | 2004 | |
| 7,476,327 Method of manufacture for microelectromechanical devices | 29 | 2004 | |
| 7,060,895 Modifying the electro-mechanical behavior of devices | 38 | 2004 | |
| 7,280,265 Interferometric modulation of radiation | 40 | 2004 | |
| 7,164,520 Packaging for an interferometric modulator | 30 | 2004 | |
| 7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device | 45 | 2004 | |
| 7,855,824 Method and system for color optimization in a display | 15 | 2005 | |
| 7,893,919 Display region architectures | 2 | 2005 | |
| 7,813,026 System and method of reducing color shift in a display | 10 | 2005 | |
| 7,551,159 System and method of sensing actuation and release voltages of an interferometric modulator | 11 | 2005 | |
| 7,424,198 Method and device for packaging a substrate | 2 | 2005 | |
| 7,710,632 Display device having an array of spatial light modulators with integrated color filters | 22 | 2005 | |
| 7,626,751 Display device having an array of spatial light modulators with integrated color filters | 0 | 2005 | |
| 7,142,346 System and method for addressing a MEMS display | 27 | 2005 | |
| 7,515,147 Staggered column drive circuit systems and methods | 9 | 2005 | |
| 7,379,227 Method and device for modulating light | 10 | 2005 | |
| 7,355,780 System and method of illuminating interferometric modulators using backlighting | 35 | 2005 | |
| 7,289,259 Conductive bus structure for interferometric modulator array | 55 | 2005 | |
| 7,460,246 Method and system for sensing light using interferometric elements | 8 | 2005 | |
| 7,560,299 Systems and methods of actuating MEMS display elements | 7 | 2005 | |
| 7,012,732 Method and device for modulating light with a time-varying signal | 53 | 2005 | |
| 7,359,066 Electro-optical measurement of hysteresis in interferometric modulators | 7 | 2005 | |
| 7,701,631 Device having patterned spacers for backplates and method of making the same | 2 | 2005 | |
| 7,928,928 Apparatus and method for reducing perceived color shift | 4 | 2005 | |
| 7,259,449 Method and system for sealing a substrate | 12 | 2005 | |
| 7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 3 | 2005 | |
| 7,668,415 Method and device for providing electronic circuitry on a backplate | 5 | 2005 | |
| 7,429,334 Methods of fabricating interferometric modulators by selectively removing a material | 12 | 2005 | |
| 7,420,728 Methods of fabricating interferometric modulators by selectively removing a material | 15 | 2005 | |
| 7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate | 7 | 2005 | |
| 7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion | 7 | 2005 | |
| 7,299,681 Method and system for detecting leak in electronic devices | 1 | 2005 | |
| 7,920,135 Method and system for driving a bi-stable display | 3 | 2005 | |
| 7,679,627 Controller and driver features for bi-stable display | 1 | 2005 | |
| 7,586,484 Controller and driver features for bi-stable display | 13 | 2005 | |
| 7,535,466 System with server based control of client device display features | 5 | 2005 | |
| 7,532,195 Method and system for reducing power consumption in a display | 2 | 2005 | |
| 7,302,157 System and method for multi-level brightness in interferometric modulation | 37 | 2005 | |
| 7,289,256 Electrical characterization of interferometric modulators | 11 | 2005 | |
| 7,602,375 Method and system for writing data to MEMS display elements | 0 | 2005 | |
| 7,916,103 System and method for display device with end-of-life phenomena | 1 | 2005 | |
| 7,321,456 Method and device for corner interferometric modulation | 32 | 2005 | |
| 7,573,547 System and method for protecting micro-structure of display array using spacers in gap within display device | 6 | 2005 | |
| 7,626,581 Device and method for display memory using manipulation of mechanical response | 1 | 2005 | |
| 7,372,613 Method and device for multistate interferometric light modulation | 63 | 2005 | |
| 8,362,987 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,889,163 Drive method for MEMS devices | 6 | 2005 | |
| 7,692,839 System and method of providing MEMS device with anti-stiction coating | 1 | 2005 | |
| 7,420,725 Device having a conductive light absorbing mask and method for fabricating same | 29 | 2005 | |
| 7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge | 3 | 2005 | |
| 7,403,321 Optical microelectromechanical device | 0 | 2005 | |
| 7,843,410 Method and device for electrically programmable display | 4 | 2005 | |
| 7,719,500 Reflective display pixels arranged in non-rectangular arrays | 26 | 2005 | |
| 7,547,565 Method of manufacturing optical interference color display | 12 | 2005 | |
| 7,527,995 Method of making prestructure for MEMS systems | 20 | 2005 | |
| 7,164,524 Optical microelectromechanical device and fabrication method thereof | 0 | 2005 | |
| 7,808,703 System and method for implementation of interferometric modulator displays | 2 | 2005 | |
| 7,349,136 Method and device for a display having transparent components integrated therein | 7 | 2005 | |
| RE42119 Microelectrochemical systems device and method for fabricating same | 4 | 2005 | |
| 8,008,736 Analog interferometric modulator device | 0 | 2005 | |
| 7,710,629 System and method for display device with reinforcing substance | 3 | 2005 | |
| 7,460,292 Interferometric modulator with internal polarization and drive method | 19 | 2005 | |
| 8,124,434 Method and system for packaging a display | 0 | 2005 | |
| 7,554,714 Device and method for manipulation of thermal response in a modulator | 18 | 2005 | |
| 7,471,444 Interferometric modulation of radiation | 12 | 2005 | |
| 7,388,706 Photonic MEMS and structures | 10 | 2005 | |
| 7,345,805 Interferometric modulator array with integrated MEMS electrical switches | 6 | 2005 | |
| 7,196,837 Area array modulation and lead reduction in interferometric modulators | 18 | 2005 | |
| 7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 53 | 2005 | |
| 8,004,504 Reduced capacitance display element | 3 | 2005 | |
| 7,553,684 Method of fabricating interferometric devices using lift-off processing techniques | 6 | 2005 | |
| 7,417,783 Mirror and mirror layer for optical modulator and method | 7 | 2005 | |
| 7,373,026 MEMS device fabricated on a pre-patterned substrate | 12 | 2005 | |
| 7,343,080 System and method of testing humidity in a sealed MEMS device | 8 | 2005 | |
| RE40436 Hermetic seal and method to create the same | 7 | 2005 | |
| 7,304,784 Reflective display device having viewable display on both sides | 33 | 2005 | |
| 7,161,730 System and method for providing thermal compensation for an interferometric modulator display | 78 | 2005 | |
| 7,567,373 System and method for micro-electromechanical operation of an interferometric modulator | 19 | 2005 | |
| 7,936,497 MEMS device having deformable membrane characterized by mechanical persistence | 0 | 2005 | |
| 7,463,421 Method and device for modulating light | 15 | 2005 | |
| 7,317,568 System and method of implementation of interferometric modulators for display mirrors | 1 | 2005 | |
| 7,310,179 Method and device for selective adjustment of hysteresis window | 8 | 2005 | |
| 7,724,993 MEMS switches with deforming membranes | 0 | 2005 | |
| 7,492,502 Method of fabricating a free-standing microstructure | 11 | 2005 | |
| 7,417,735 Systems and methods for measuring color and contrast in specular reflective devices | 24 | 2005 | |
| 7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 14 | 2005 | |
| 7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator | 10 | 2005 | |
| 7,136,213 Interferometric modulators having charge persistence | 14 | 2005 | |
| 7,911,428 Method and device for manipulating color in a display | 14 | 2005 | |
| 7,807,488 Display element having filter material diffused in a substrate of the display element | 17 | 2005 | |
| 7,728,800 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,564,612 Photonic MEMS and structures | 53 | 2005 | |
| 7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator | 146 | 2005 | |
| 7,369,294 Ornamental display device | 38 | 2005 | |
| 7,710,636 Systems and methods using interferometric optical modulators and diffusers | 19 | 2005 | |
| 7,684,104 MEMS using filler material and method | 7 | 2005 | |
| 7,898,521 Device and method for wavelength filtering | 17 | 2005 | |
| 7,782,293 Device and method for wavelength filtering | 0 | 2005 | |
| 7,653,371 Selectable capacitance circuit | 10 | 2005 | |
| 7,415,186 Methods for visually inspecting interferometric modulators for defects | 4 | 2005 | |
| 7,675,669 Method and system for driving interferometric modulators | 2 | 2005 | |
| 7,485,236 Interference display cell and fabrication method thereof | 9 | 2005 | |
| 7,453,579 Measurement of the dynamic characteristics of interferometric modulators | 11 | 2005 | |
| 7,545,550 Systems and methods of actuating MEMS display elements | 1 | 2005 | |
| 8,310,441 Method and system for writing data to MEMS display elements | 0 | 2005 | |
| 7,446,927 MEMS switch with set and latch electrodes | 5 | 2005 | |
| 7,486,429 Method and device for multistate interferometric light modulation | 8 | 2005 | |
| 7,236,284 Photonic MEMS and structures | 83 | 2005 | |
| 7,630,114 Diffusion barrier layer for MEMS devices | 1 | 2005 | |
| 8,014,059 System and method for charge control in a MEMS device | 0 | 2005 | |
| 7,618,831 Method of monitoring the manufacture of interferometric modulators | 0 | 2005 | |
| 7,403,323 Process control monitors for interferometric modulators | 1 | 2005 | |
| 7,369,252 Process control monitors for interferometric modulators | 0 | 2005 | |
| 7,259,865 Process control monitors for interferometric modulators | 20 | 2005 | |
| 7,561,334 Method and apparatus for reducing back-glass deflection in an interferometric modulator display device | 1 | 2005 | |
| 8,391,630 System and method for power reduction when decompressing video streams for interferometric modulator displays | 0 | 2005 | |
| 7,795,061 Method of creating MEMS device cavities by a non-etching process | 1 | 2005 | |
| 7,355,779 Method and system for driving MEMS display elements | 1 | 2006 | |
| 7,916,980 Interconnect structure for MEMS device | 0 | 2006 | |
| 7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 4 | 2006 | |
| 8,194,056 Method and system for writing data to MEMS display elements | 0 | 2006 | |
| 7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof | 2 | 2006 | |
| 7,547,568 Electrical conditioning of MEMS device and insulating layer thereof | 6 | 2006 | |
| 7,550,810 MEMS device having a layer movable at asymmetric rates | 19 | 2006 | |
| 7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers | 40 | 2006 | |
| 7,483,197 Photonic MEMS and structures | 16 | 2006 | |
| 7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices | 11 | 2006 | |
| 7,532,377 Movable micro-electromechanical device | 28 | 2006 | |
| 7,643,203 Interferometric optical display system with broadband characteristics | 17 | 2006 | |
| 7,948,457 Systems and methods of actuating MEMS display elements | 0 | 2006 | |
| 7,903,047 Mode indicator for interferometric modulator displays | 2 | 2006 | |
| 7,711,239 Microelectromechanical device and method utilizing nanoparticles | 0 | 2006 | |
| 7,623,287 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,527,996 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,417,784 Microelectromechanical device and method utilizing a porous surface | 42 | 2006 | |
| 8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 1 | 2006 | |
| 7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 0 | 2006 | |
| 8,049,713 Power consumption optimized display update | 1 | 2006 | |
| 7,920,136 System and method of driving a MEMS display device | 0 | 2006 | |
| 7,706,044 Optical interference display cell and method of making the same | 8 | 2006 | |
| 7,880,954 Integrated modulator illumination | 14 | 2006 | |
| 7,369,292 Electrode and interconnect materials for MEMS devices | 13 | 2006 | |
| 7,349,139 System and method of illuminating interferometric modulators using backlighting | 15 | 2006 | |
| 8,174,469 Dynamic driver IC and display panel configuration | 0 | 2006 | |
| 7,848,001 Method and system for interferometric modulation in projection or peripheral devices | 4 | 2006 | |
| 7,907,319 Method and device for modulating light with optical compensation | 19 | 2006 | |
| 7,161,094 Modifying the electro-mechanical behavior of devices | 17 | 2006 | |
| 7,372,619 Display device having a movable structure for modulating light and method thereof | 74 | 2006 | |
| 7,649,671 Analog interferometric modulator device with electrostatic actuation and release | 7 | 2006 | |
| 7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports | 3 | 2006 | |
| 7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts | 60 | 2006 | |
| 7,636,151 System and method for providing residual stress test structures | 0 | 2006 | |
| 7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures | 4 | 2006 | |
| 7,702,192 Systems and methods for driving MEMS display | 0 | 2006 | |
| 7,835,061 Support structures for free-standing electromechanical devices | 4 | 2006 | |
| 7,385,744 Support structure for free-standing MEMS device and methods for forming the same | 42 | 2006 | |
| 7,777,715 Passive circuits for de-multiplexing display inputs | 2 | 2006 | |
| 7,527,998 Method of manufacturing MEMS devices providing air gap control | 10 | 2006 | |
| 7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs | 4 | 2006 | |
| 7,566,940 Electromechanical devices having overlying support structures | 7 | 2006 | |
| 7,534,640 Support structure for MEMS device and methods therefor | 13 | 2006 | |
| 7,830,586 Transparent thin films | 10 | 2006 | |
| 7,554,711 MEMS devices with stiction bumps | 30 | 2006 | |
| 7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices | 3 | 2006 | |
| 7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants | 24 | 2006 | |
| 7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge | 2 | 2006 | |
| 7,928,940 Drive method for MEMS devices | 0 | 2006 | |
| 7,845,841 Angle sweeping holographic illuminator | 10 | 2006 | |
| 7,898,722 Microelectromechanical device with restoring electrode | 26 | 2006 | |
| 7,629,197 Spatial light modulator | 27 | 2006 | |
| 7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure | 4 | 2006 | |
| 7,385,748 Visible spectrum modulator arrays | 26 | 2006 | |
| 7,388,697 System and method for addressing a MEMS display | 6 | 2006 | |
| 7,242,512 System and method for addressing a MEMS display | 7 | 2006 | |
| 7,667,884 Interferometric modulators having charge persistence | 3 | 2006 | |
| 7,864,395 Light guide including optical scattering elements and a method of manufacture | 14 | 2006 | |
| 7,385,762 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 40 | 2006 | |
| 7,706,042 MEMS device and interconnects for same | 2 | 2006 | |
| 7,535,621 Aluminum fluoride films for microelectromechanical system applications | 23 | 2006 | |
| 8,284,474 Method and system for interferometric modulation in projection or peripheral devices | 0 | 2007 | |
| 7,884,989 White interferometric modulators and methods for forming the same | 2 | 2007 | |
| 7,872,792 Method and device for modulating light with multiple electrodes | 4 | 2007 | |
| 7,777,954 Systems and methods of providing a light guiding layer | 17 | 2007 | |
| 8,004,514 Method and system for updating of displays showing deterministic content | 2 | 2007 | |
| 7,518,775 Method and system for packaging a MEMS device | 6 | 2007 | |
| 7,742,220 Microelectromechanical device and method utilizing conducting layers separated by stops | 7 | 2007 | |
| 7,746,537 MEMS devices and processes for packaging such devices | 9 | 2007 | |
| 7,715,080 Packaging a MEMS device using a frame | 1 | 2007 | |
| 8,059,326 Display devices comprising of interferometric modulator and sensor | 1 | 2007 | |
| 7,738,156 Display devices comprising of interferometric modulator and sensor | 0 | 2007 | |
| 7,715,085 Electromechanical system having a dielectric movable membrane and a mirror | 4 | 2007 | |
| 7,643,202 Microelectromechanical system having a dielectric movable membrane and a mirror | 5 | 2007 | |
| 8,111,262 Interferometric modulator displays with reduced color sensitivity | 0 | 2007 | |
| 7,625,825 Method of patterning mechanical layer for MEMS structures | 0 | 2007 | |
| 7,643,199 High aperture-ratio top-reflective AM-iMod displays | 6 | 2007 | |
| 7,826,127 MEMS device having a recessed cavity and methods therefor | 0 | 2007 | |
| 7,782,517 Infrared and dual mode displays | 4 | 2007 | |
| 7,944,599 Electromechanical device with optical function separated from mechanical and electrical function | 1 | 2007 | |
| 7,630,121 Electromechanical device with optical function separated from mechanical and electrical function | 9 | 2007 | |
| 7,612,932 Microelectromechanical device with optical function separated from mechanical and electrical function | 14 | 2007 | |
| 8,068,268 MEMS devices having improved uniformity and methods for making them | 1 | 2007 | |
| 7,595,926 Integrated IMODS and solar cells on a substrate | 10 | 2007 | |
| 8,115,987 Modulating the intensity of light from an interferometric reflector | 0 | 2007 | |
| 7,642,127 Method and system for sealing a substrate | 2 | 2007 | |
| 7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device | 14 | 2007 | |
| 7,852,545 Method and device for modulating light | 8 | 2007 | |
| 7,808,694 Method and device for modulating light | 8 | 2007 | |
| 7,629,678 Method and system for sealing a substrate | 1 | 2007 | |
| 8,072,402 Interferometric optical modulator with broadband reflection characteristics | 2 | 2007 | |
| 7,492,503 System and method for multi-level brightness in interferometric modulation | 19 | 2007 | |
| 7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same | 2 | 2007 | |
| 7,564,613 Microelectromechanical device and method utilizing a porous surface | 2 | 2007 | |
| 7,982,700 Conductive bus structure for interferometric modulator array | 0 | 2007 | |
| 7,542,198 Device having a conductive light absorbing mask and method for fabricating same | 19 | 2007 | |
| 7,999,993 Reflective display device having viewable display on both sides | 0 | 2007 | |
| 7,773,286 Periodic dimple array | 2 | 2007 | |
| 8,068,710 Decoupled holographic film and diffuser | 0 | 2007 | |
| 7,715,079 MEMS devices requiring no mechanical support | 3 | 2007 | |
| 8,058,549 Photovoltaic devices with integrated color interferometric film stacks | 1 | 2007 | |
| 7,929,196 System and method of implementation of interferometric modulators for display mirrors | 5 | 2008 | |
| 7,847,999 Interferometric modulator display devices | 1 | 2008 | |
| 8,111,445 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 7,663,794 Methods and devices for inhibiting tilting of a movable element in a MEMS device | 8 | 2008 | |
| 7,515,327 Method and device for corner interferometric modulation | 10 | 2008 | |
| 7,623,752 System and method of testing humidity in a sealed MEMS device | 4 | 2008 | |
| 7,570,865 System and method of testing humidity in a sealed MEMS device | 1 | 2008 | |
| 7,863,079 Methods of reducing CD loss in a microelectromechanical device | 0 | 2008 | |
| 7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 2 | 2008 | |
| 8,045,252 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 8,164,821 Microelectromechanical device with thermal expansion balancing layer or stiffening layer | 0 | 2008 | |
| 8,040,588 System and method of illuminating interferometric modulators using backlighting | 0 | 2008 | |
| 7,719,747 Method and post structures for interferometric modulation | 13 | 2008 | |
| 8,094,358 Dimming mirror | 0 | 2008 | |
| 7,612,933 Microelectromechanical device with spacing layer | 16 | 2008 | |
| 7,660,028 Apparatus and method of dual-mode display | 8 | 2008 | |
| 8,077,326 Human-readable, bi-state environmental sensors based on micro-mechanical membranes | 0 | 2008 | |
| 7,852,491 Human-readable, bi-state environmental sensors based on micro-mechanical membranes | 3 | 2008 | |
| 7,787,130 Human-readable, bi-state environmental sensors based on micro-mechanical membranes | 5 | 2008 | |
| 7,787,171 Human-readable, bi-state environmental sensors based on micro-mechanical membranes | 2 | 2008 | |
| 7,898,723 Microelectromechanical systems display element with photovoltaic structure | 5 | 2008 | |
| 7,969,638 Device having thin black mask and method of fabricating the same | 0 | 2008 | |
| 7,545,554 MEMS display | 4 | 2008 | |
| 7,583,429 Ornamental display device | 2 | 2008 | |
| 7,839,557 Method and device for multistate interferometric light modulation | 5 | 2008 | |
| 8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 1 | 2008 | |
| 7,860,668 Pressure measurement using a MEMS device | 1 | 2008 | |
| 8,023,167 Backlight displays | 0 | 2008 | |
| 7,768,690 Backlight displays | 1 | 2008 | |
| 7,746,539 Method for packing a display device and the device obtained thereof | 1 | 2008 | |
| 8,226,836 Mirror and mirror layer for optical modulator and method | 0 | 2008 | |
| 7,855,826 Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices | 6 | 2008 | |
| 8,045,835 Method and device for packaging a substrate | 1 | 2008 | |
| 8,395,371 Methods for characterizing the behavior of microelectromechanical system devices | 0 | 2008 | |
| 8,274,299 Methods for measurement and characterization of interferometric modulators | 0 | 2008 | |
| 8,258,800 Methods for measurement and characterization of interferometric modulators | 0 | 2008 | |
| 8,115,471 Methods for measurement and characterization of interferometric modulators | 1 | 2008 | |
| 7,719,754 Multi-thickness layers for MEMS and mask-saving sequence for same | 0 | 2008 | |
| 8,054,527 Adjustably transmissive MEMS-based devices | 0 | 2008 | |
| 7,852,483 Method and system for sensing light using an interferometric element having a coupled temperature sensor | 2 | 2008 | |
| 7,704,772 Method of manufacture for microelectromechanical devices | 11 | 2008 | |
| 7,859,740 Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control | 0 | 2008 | |
| 8,193,441 Photovoltaics with interferometric ribbon masks | 0 | 2008 | |
| 8,111,446 Optical films for controlling angular characteristics of displays | 1 | 2008 | |
| 7,978,396 Optical interference display panel | 1 | 2008 | |
| 7,787,173 System and method for multi-level brightness in interferometric modulation | 6 | 2008 | |
| 7,808,695 Method and apparatus for low range bit depth enhancement for MEMS display architectures | 0 | 2008 | |
| 8,416,487 Photonic MEMS and structures | 0 | 2009 | |
| 8,169,687 Photonic MEMS and structures | 0 | 2009 | |
| 7,646,529 Method and device for multistate interferometric light modulation | 1 | 2009 | |
| 8,386,201 Methods for measurement and characterization of interferometric modulators | 0 | 2009 | |
| 7,830,588 Method of making a light modulating display device and associated transistor circuitry and structures thereof | 11 | 2009 | |
| 7,944,604 Interferometric modulator in transmission mode | 1 | 2009 | |
| 8,300,304 Integrated front light diffuser for reflective displays | 0 | 2009 | |
| 8,169,426 Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same | 0 | 2009 | |
| 8,040,589 Devices and methods for enhancing brightness of displays using angle conversion layers | 0 | 2009 | |
| 8,410,690 Display device with desiccant | 0 | 2009 | |
| 7,969,641 Device having power generating black mask and method of fabricating the same | 0 | 2009 | |
| 8,270,056 Display device with openings between sub-pixels and method of making same | 0 | 2009 | |
| 8,405,649 Low voltage driver scheme for interferometric modulators | 0 | 2009 | |
| 8,061,882 Illumination device with built-in light coupler | 0 | 2009 | |
| 8,368,981 Display device with diffractive optics | 0 | 2009 | |
| 8,115,983 Method and system for packaging a MEMS device | 0 | 2009 | |
| 8,049,951 Light with bi-directional propagation | 0 | 2009 | |
| 7,889,415 Device having a conductive light absorbing mask and method for fabricating same | 4 | 2009 | |
| 8,102,590 Method of manufacturing MEMS devices providing air gap control | 0 | 2009 | |
| 8,081,370 Support structures for electromechanical systems and methods of fabricating the same | 0 | 2009 | |
| 7,952,787 Method of manufacturing MEMS devices providing air gap control | 0 | 2009 | |
| 8,004,736 Optical interference display panel and manufacturing method thereof | 0 | 2009 | |
| 8,207,920 System and method of sensing actuation and release voltages of an interferometric modulator | 1 | 2009 | |
| 7,986,451 Optical films for directing light towards active areas of displays | 0 | 2009 | |
| 7,906,353 Method of fabricating interferometric devices using lift-off processing techniques | 0 | 2009 | |
| 7,944,601 Display device | 1 | 2009 | |
| 7,889,417 Electromechanical system having a dielectric movable membrane | 2 | 2009 | |
| 8,405,899 Photonic MEMS and structures | 0 | 2009 | |
| 7,933,475 Method and apparatus for providing back-lighting in a display device | 7 | 2009 | |
| 8,094,363 Integrated imods and solar cells on a substrate | 0 | 2009 | |
| 8,358,266 Light turning device with prismatic light turning features | 0 | 2009 | |
| 8,270,062 Display device with at least one movable stop element | 0 | 2009 | |
| 8,068,269 Microelectromechanical device with spacing layer | 0 | 2009 | |
| 8,244,092 System and method of testing humidity in a sealed MEMS device | 0 | 2009 | |
| 8,379,392 Light-based sealing and device packaging | 0 | 2009 | |
| 7,935,555 Method and system for sealing a substrate | 0 | 2009 | |
| 7,920,319 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2009 | |
| 8,045,256 Method and device for compensating for color shift as a function of angle of view | 0 | 2009 | |
| 7,948,671 Apparatus and method for reducing slippage between structures in an interferometric modulator | 1 | 2009 | |
| 7,924,494 Apparatus and method for reducing slippage between structures in an interferometric modulator | 0 | 2009 | |
| 8,422,108 Method and device for modulating light with optical compensation | 0 | 2009 | |
| 8,144,385 Method and device for multistate interferometric light modulation | 0 | 2010 | |
| 8,098,416 Analog interferometric modulator device with electrostatic actuation and release | 0 | 2010 | |
| 8,340,615 Selectable capacitance circuit | 0 | 2010 | |
| 8,023,169 Apparatus and method of dual-mode display | 0 | 2010 | |
| 7,881,686 Selectable Capacitance Circuit | 6 | 2010 | |
| 7,933,476 Method and device for providing electronic circuitry on a backplate | 3 | 2010 | |
| 7,852,544 Separable modulator | 31 | 2010 | |
| 8,054,532 Method and device for providing illumination to interferometric modulators | 0 | 2010 | |
| 8,390,916 System and method for false-color sensing and display | 0 | 2010 | |
| 8,394,656 Method of creating MEMS device cavities by a non-etching process | 0 | 2010 | |
| 8,344,997 Method and system for writing data to electromechanical display elements | 0 | 2010 | |
| 7,898,725 Apparatuses with enhanced low range bit depth | 2 | 2010 | |
| 8,081,373 Devices and methods for enhancing color shift of interferometric modulators | 0 | 2010 | |
| 8,213,075 Method and device for multistate interferometric light modulation | 0 | 2010 | |
| 8,078,128 Selectable capacitance circuit | 1 | 2010 | |
| 8,035,883 Device having a conductive light absorbing mask and method for fabricating same | 0 | 2011 | |
| 8,441,412 Mode indicator for interferometric modulator displays | 0 | 2011 | |
| 8,098,417 Electromechanical system having a dielectric movable membrane | 0 | 2011 | |
| 8,368,997 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2011 | |
| 8,358,459 Display | 0 | 2011 | |
| 8,416,154 Apparatus and method for reducing perceived color shift | 0 | 2011 | |
| 8,289,613 Electromechanical device with optical function separated from mechanical and electrical function | 0 | 2011 | |
| 8,174,752 Interferometric modulator in transmission mode | 0 | 2011 | |
| 8,090,229 Method and device for providing electronic circuitry on a backplate | 1 | 2011 | |
| 8,390,547 Conductive bus structure for interferometric modulator array | 0 | 2011 | |
| 8,310,758 Printable static interferometric images | 0 | 2011 | |
| 8,243,360 Device having a conductive light absorbing mask and method for fabricating same | 0 | 2011 | |
| 8,437,070 Interferometric modulator with dielectric layer | 0 | 2011 | |
|
|
|||
| 7,417,782 Methods and apparatus for spatial light modulation | 15 | 2005 | |
| 7,304,785 Display methods and apparatus | 21 | 2005 | |
| 7,304,786 Methods and apparatus for bi-stable actuation of displays | 23 | 2005 | |
| 7,271,945 Methods and apparatus for actuating displays | 20 | 2005 | |
| 8,159,428 Display methods and apparatus | 0 | 2006 | |
| 7,755,582 Display methods and apparatus | 1 | 2006 | |
| 7,742,016 Display methods and apparatus | 1 | 2006 | |
| 7,616,368 Light concentrating reflective display methods and apparatus | 1 | 2006 | |
| 7,405,852 Display apparatus and methods for manufacture thereof | 25 | 2006 | |
| 7,876,489 Display apparatus with optical cavities | 13 | 2006 | |
| 7,619,806 Methods and apparatus for spatial light modulation | 4 | 2006 | |
| 8,310,442 Circuits for controlling display apparatus | 0 | 2006 | |
| 7,502,159 Methods and apparatus for actuating displays | 11 | 2007 | |
| 7,365,897 Methods and apparatus for spatial light modulation | 15 | 2007 | |
| 7,675,665 Methods and apparatus for actuating displays | 4 | 2007 | |
| 7,839,356 Display methods and apparatus | 3 | 2007 | |
| 7,636,189 Display methods and apparatus | 2 | 2007 | |
| 7,551,344 Methods for manufacturing displays | 3 | 2007 | |
| 7,927,654 Methods and apparatus for spatial light modulation | 1 | 2007 | |
| 7,852,546 Spacers for maintaining display apparatus alignment | 4 | 2007 | |
| 7,746,529 MEMS display apparatus | 4 | 2007 | |
| 8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors | 1 | 2008 | |
| 8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors | 0 | 2012 | |
|
|
|||
| 7,515,336 Selective reflecting | 23 | 2004 | |
| 7,520,624 Light enhancing | 1 | 2004 | |
| 7,517,091 Color gamut improvement in presence of ambient light | 0 | 2005 | |
| 7,535,636 Selective reflecting | 1 | 2006 | |
| 8,081,368 Selective absorbing | 0 | 2007 | |
| 7,710,645 Selective reflecting for laser projector | 0 | 2007 | |
|
|
|||
| 7,733,553 Light modulator with tunable optical state | 2 | 2005 | |
| 7,447,891 Light modulator with concentric control-electrode structure | 2 | 2005 | |
|
|
|||
| 7,256,922 Interferometric modulators with thin film transistors | 27 | 2004 | |
|
|
|||
| 8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities | 0 | 2011 | |
|
|
|||
| 7,532,385 Optical interference display panel and manufacturing method thereof | 10 | 2004 | |
|
|
|||
| 7,499,208 Current mode display driver circuit realization feature | 5 | 2005 | |
|
|
|||
| 8,466,858 Sensing to determine pixel state in a passively addressed display array | 0 | 2009 | |
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 20, 2013 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |