MEMS optical switch with acoustic pulse actuation
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United States of America Patent
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N/A
Issued Date -
Jun 20, 2002
app pub date -
Nov 6, 2001
filing date -
Dec 14, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An acoustic pulse is used to actuate the movable part of a MEMS device. The MEMS device generally comprises a substrate one or more movable elements coupled to the substrate and means for acoustic pulse actuation of at least one of the one or more movable elements. The MEMS device may be in the form of an optical switch having one or more mirrors rotatably attached to a substrate. Acoustic pulse actuation eliminates the need for magnetic pads and electromagnets along with the disadvantages associated with MEMS devices having these components. Furthermore, the acoustic pulse actuation may take place in a liquid environment, which reduces problems with stiction and improves the reliability of the device.
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